Method for preventing electrostatic discharge in a clean room

Details Method for preventing electrostatic discharge in a clean room Method for preventing electrostatic discharge in a clean room

2005-03-29

2005-03-29

Mayekar, Kishor (Department: 1753)

Electricity: electrical systems and devices

Discharging or preventing accumulation of electric charge

By charged gas irradiation

C361S231000, C204S164000

Reexamination Certificate

active

06873515

ABSTRACT:
The present invention provides a method of removing electrostatic charges from a clean room with a laminar flow apparatus. The laminar flow apparatus is disposed on a ceiling of the clean room. An ion generator at a first height and a transportation system at a second height are disposed in the laminar flow. An output tip of an emitter of the ion generator faces toward the ceiling to enlarge a divergent angle between positive and negative ions, effectively removing the electrostatic charges from the clean room and from a carrier in the transportation system.

REFERENCES:
patent: 5057966 (1991-10-01), Sakata et al.

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