Valve for a slurry outlet opening of a chemical mechanical...

Details Valve for a slurry outlet opening of a chemical mechanical... Valve for a slurry outlet opening of a chemical mechanical...

Filed on

2005-02-15

Date issued

2005-02-15

Examiner

Krishnamurthy, Ramesh (Department: 3753)

Patent Class

Fluid handling

SubClass

Line condition change responsive valves

SubSubClass

Direct response valves

Other Related Categories

C137S849000, C451S101000, C451S102000, C451S446000, C438S693000

Type

Reexamination Certificate

Status

active

Patent number

06854484

Description

ABSTRACT:
A valve for a slurry outlet opening in an installation for chemical mechanical polishing, in particular of semiconductor wafers in DRAM production, includes an elastic diaphragm, which covers the slurry outlet opening and has at least one self-closing opening. It is possible for the opening to be moved into a feedthrough position for the slurry by flowing slurry and to be automatically moved into a blocking position for the slurry when the slurry is not flowing. A CMP installation having such a valve is also provided. This creates a simple way of preventing particle agglomerations in the region of the fluid outlet opening of a CMP installation.

REFERENCES:
patent: RE682 (1859-04-01), Peale
patent: 187411 (1877-02-01), Painter
patent: 2674318 (1954-04-01), Sutliff
patent: 2810347 (1957-10-01), Rippingille
patent: RE27399 (1972-06-01), Urso
patent: 4593716 (1986-06-01), Cesna
patent: 4607663 (1986-08-01), Raftis et al.
patent: 4718826 (1988-01-01), Simmer
patent: 4945688 (1990-08-01), Yie
patent: 5330437 (1994-07-01), Durman
patent: 5769125 (1998-06-01), Duer et al.
patent: 5895315 (1999-04-01), Pinder, Jr.
patent: 5957759 (1999-09-01), Cardenas et al.
patent: 6107203 (2000-08-01), Vanell
patent: 6378559 (2002-04-01), Humphryson
patent: 6425804 (2002-07-01), Pettit et al.
patent: 6453941 (2002-09-01), Milhas et al.
patent: 6551174 (2003-04-01), Brown et al.
patent: 6585005 (2003-07-01), Raftis et al.
patent: 10193257 (1998-07-01), None
patent: 11253893 (1999-09-01), None

Affiliated with

Also associated with

Rating

Valve for a slurry outlet opening of a chemical mechanical... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Valve for a slurry outlet opening of a chemical mechanical..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Valve for a slurry outlet opening of a chemical mechanical... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3454239