Inkjet printhead with ink supply passage formed from both...

Details Inkjet printhead with ink supply passage formed from both... Inkjet printhead with ink supply passage formed from both...

2005-11-08

2005-11-08

Tran, Huan (Department: 2861)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S056000, C216S027000, C438S021000, C029S890100

Reexamination Certificate

active

06962402

ABSTRACT:
An inkjet printhead with nozzles4and liquid passages31, 32leading to each nozzle. The nozzles, ejection actuators14, associated drive circuitry22and liquid passage31, 32being formed on and through a wafer21using lithographically masked etching technique, such that the wafer has a droplet ejection side and a liquid supply side. Each of the liquid passages is formed by etching a hole31partially through the wafer21from the droplet ejection side, and etching a passage from the liquid supply side of the wafer21to the hole31. Etching a hole31into the wafer21from the droplet ejection side means the ink supply passage32can stop short of the interface between the dielectric23and the wafer21to prevent the etchant from tracking sideways and damaging the drive circuitry22. As the inlet hole31is relatively shallow, the removal of the resist is not overly difficult. However, setting the depth of the supply passage etch so that it overlaps the blind end of the hole by more than the combined tolerances of both etching processes ensures an adequate fluid connection to the nozzle. This permits a more compact overall design and higher nozzle packing density.

REFERENCES:
patent: 5548894 (1996-08-01), Muto
patent: 6364453 (2002-04-01), Silverbrook
patent: 6425651 (2002-07-01), Silverbrook
patent: 6536874 (2003-03-01), Silverbrook
patent: 6666544 (2003-12-01), Silverbrook
patent: 6780340 (2004-08-01), Conta
patent: 2003/0137561 (2003-07-01), Conta et al.
patent: WO 00/23279 (2000-04-01), None

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