Micro-mechanical system employing electrostatic actuator and...

Details Micro-mechanical system employing electrostatic actuator and... Micro-mechanical system employing electrostatic actuator and...

2005-05-03

2005-05-03

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C310S309000, C073S504090

Reexamination Certificate

active

06888662

ABSTRACT:
A vertical electrostatic actuator is based on a layered structure consisting of two conducting or semiconducting layers separated by an insulating layer and/or layered structure consisting of p-type and n-type layers separated by a pn-junction. The number of conducting layers, p-type layers and/or n-type layers can be more than two as long as each two adjacent layers are separated by an insulating layer or a pn-junction. The mobile electrode of the actuator can be formed along a flexure in a micro-mechanical system. Two stationary electrodes are located on either side of the mobile electrode. The layered structure of the electrodes increases the torque on the flexure and thus improves the performance of the actuator. Fabrication methods for the electrostatic actuator and micro-mechanical systems employing the same are disclosed.

REFERENCES:
patent: 5362213 (1994-11-01), Komatsu et al.
patent: 5969848 (1999-10-01), Lee et al.
patent: 6407851 (2002-06-01), Islam et al.
patent: 6593677 (2003-07-01), Behin et al.
patent: WO 0173934 (2001-10-01), None
patent: WO 0173935 (2001-10-01), None
patent: WO 0173936 (2001-10-01), None
patent: WO 0173937 (2001-10-01), None
patent: WO 0174707 (2001-10-01), None
patent: WO 0176055 (2001-10-01), None

Affiliated with

Also associated with

Rating

Micro-mechanical system employing electrostatic actuator and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micro-mechanical system employing electrostatic actuator and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro-mechanical system employing electrostatic actuator and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3451771