Sensor with built-in circuits and pressure detector using...

Details Sensor with built-in circuits and pressure detector using... Sensor with built-in circuits and pressure detector using...

2005-09-13

2005-09-13

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C257S417000

Reexamination Certificate

active

06941815

ABSTRACT:
A sensor with built-in circuits can be improved in the stability of the operation or characteristics. A circuit region and a sensor region are covered by a passivation film. The sensor region is partially covered by the passivation film. The sensor region and circuit region are protected by the passivation film, and an effect of the passivation film on the mechanical displacement of a diaphragm portion can be alleviated so that the sensor with built-in circuits may be improved in the stability of the operation or characteristics.

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Motorola Semiconductor Application Note, “An Integrated Silicon Bulk Micromachined Barometric Pressure Sensor For Engine Control Unit and External Mount”, 1998, pp. 1-8.

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