Buried power bus utilized as a sinker for high current, high...

Details Buried power bus utilized as a sinker for high current, high... Buried power bus utilized as a sinker for high current, high...

2005-05-17

2005-05-17

Wilson, Christian (Department: 2824)

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified configuration

C257S565000, C438S629000

Reexamination Certificate

active

06894393

ABSTRACT:
A method and system for providing a sinker on a semiconductor device is described. The method and system includes providing a substrate region and providing a buried layer and an epitaxial (EPI) layer over the substrate region. The method and system further includes etching a plurality of device structures in the EPI layer and providing a slot in the semiconductor substrate that is in contact with the buried layer and the substrate region. The method and system finally includes oxidizing the slot except at the bottom of the slot and providing metal within the slot.

REFERENCES:
patent: 4933743 (1990-06-01), Thomas et al.
patent: 5369291 (1994-11-01), Swanson
patent: 5436190 (1995-07-01), Yang et al.
patent: 5612567 (1997-03-01), Baliga
patent: 5614750 (1997-03-01), Ellul et al.
patent: 5691555 (1997-11-01), Zambrano
patent: 5844273 (1998-12-01), Konishi
patent: 5894140 (1999-04-01), Terasawa
patent: 5903031 (1999-05-01), Yamada et al.
patent: 5929482 (1999-07-01), Kawakami et al.
patent: 6008127 (1999-12-01), Yamada
patent: 6020600 (2000-02-01), Miyajima et al.
patent: 6359374 (2002-03-01), Dausch et al.
patent: 6369425 (2002-04-01), Ferla et al.
patent: 20010055861 (2001-12-01), Patti

Affiliated with

Also associated with

Rating

Buried power bus utilized as a sinker for high current, high... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Buried power bus utilized as a sinker for high current, high..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Buried power bus utilized as a sinker for high current, high... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3446955