Method of assisting sample inclination error adjustment

Details Method of assisting sample inclination error adjustment Method of assisting sample inclination error adjustment

2005-09-20

2005-09-20

Lee, Andrew H. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S510000, C385S052000

Reexamination Certificate

active

06947149

ABSTRACT:
While a ferrule held by a clamping apparatus is rotated by a predetermined angle, respective interference fringe images of a spherical leading end part of the ferrule are obtained at three or more rotational positions. Respective interference fringe center positions are obtained in thus obtained three or more interference fringe images. The center position of a circle passing near each of the interference fringe center positions is calculated and defined as a measured center position. Relative distance information between the measured center position and a position corresponding to the rotational center position of the spherical leading end part of the ferrule or the relative distance information and relative directional information thereof are outputted as an inclination error adjustment value for the axis of the ferrule.

REFERENCES:
patent: 6215555 (2001-04-01), Chivers

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