Polymer compound, precursor for the same and thin...

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – From phenol – phenol ether – or inorganic phenolate

Reexamination Certificate

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C528S172000, C528S173000, C528S174000, C528S183000, C528S188000, C528S220000, C528S229000, C528S272000, C528S288000, C528S350000, C528S353000, C525S420000, C525S422000, C525S432000, C525S436000, C585S352000, C560S001000, C560S008000, C560S057000

Reexamination Certificate

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06949618

ABSTRACT:
Provided are polyimide and a thin film thereof which have a three-dimensional structure and therefore are excellent in a mechanical strength and a heat resistance as compared with those of conventional linear polyimide. The polyimide is obtained from a salt of multifunctional amine represented by Formula (1):(wherein A represents a tetravalent organic group, and n represents an integer of 0 to 3) and tetracarboxylic diester represented by Formula (2):(wherein B represents a tetravalent organic group having 1 to 20 carbon atoms, and R1and R2each represent independently an alkyl group having 1 to 5 carbon atoms).

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Wiley InterScience, Macromolecular Chemistry and Physics vol. 199, Issue 6, pp. 963-969, published online Dec. 16, 1998, Research Article, Low dielectric constant polyimides derived from 1,3-bis(4-aminophenyl)adamantane.
“Theoretical Derivation of Dielectric Constant for Low-k Materials Aiming to k<1.5 Interconnects Process” Takuya Fukuda, Nobuo Aoi, Azuma Matsurra and Hironori Matsunaga / Technical Report of The Institute of Electronics Information And Communication Engineers SDM 2000-194 (Jan. 2001) / p. 51-55.
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“Solventless Polyimide Films by Vapor Deposition” J.R. Salem, F.O. Sequeda, J. Duran, and W.Y. Lee / J. Vac. Sci. Technol. A 4, May/Jun. 1986 American Vacuum Society / p. 369-374.
“A Mechanistic Study of Polyimide Formaion” James C. Johnston, Mary Ann B. Meador and William / Journal of Polymer Science: Part A: Polymer Chemisty, vol. 25, 1987 John Wiley & Sons, Inc. / p. 2174-2183.

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