Supporting system in exposure apparatus

Details Supporting system in exposure apparatus Supporting system in exposure apparatus

2005-10-04

2005-10-04

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000, C310S012060

Reexamination Certificate

active

06952254

ABSTRACT:
An exposure apparatus includes a carrying member for carrying thereon a workpiece and a supporting mechanism having a magnet, for supporting a weight of the carrying member. A force to be applied to the magnet does not change with a shift of the carrying member along a plane perpendicular to a direction in which the weight is supported.

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patent: 6172738 (2001-01-01), Korenaga et al.
patent: 6177978 (2001-01-01), Korenaga

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