Pressure sensor

Details Pressure sensor Pressure sensor

2005-08-09

2005-08-09

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S715000, C073S723000, C073S726000

Reexamination Certificate

active

06925885

ABSTRACT:
A pressure sensor includes a sensor element, and a resin package member that holds the sensor element. The sensor element is constructed by a semiconductor, and is capable of externally outputting an electric signal in accordance with strain generated when force is applied thereto. The sensor element is directly adhered to the package member via an adhesive layer that has Young's modulus in a range between 2.45×103Pa and 2.06×104Pa. Further the adhesive layer has a thickness equal to or more than 110 μm. Accordingly, the pressure sensor effectively restricts a variation in a sensor characteristic due to a thermal change.

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U.S. Appl. No. 09/547,457, filed Apr. 12, 2000, Ishio et al.

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