Digital micromirror device having mirror-attached spring tips

Details Digital micromirror device having mirror-attached spring tips Digital micromirror device having mirror-attached spring tips

2005-03-22

2005-03-22

Mack, Ricky (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000

Reexamination Certificate

active

06870660

ABSTRACT:
A micromirror array110fabricated on a semiconductor substrate11.The array110is comprised of three operating layers12, 13, 14.An addressing layer12is fabricated on the substrate. A hinge layer13is spaced above the addressing layer12by an air gap. A mirror layer14is spaced over the hinge layer13by a second air gap. The hinge layer13has a hinge13aunder and attached to the mirror14a,the hinge13apermitting the mirror14ato tilt. Spring tips13cunder the mirror14aare attached to the underside of the mirror14a.These spring tips13ctilt with the mirror14aand provide a landing point for the mirror14aonto a surface of the underlying pixel element structure.

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