Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate
2005-09-27
2005-09-27
Hail, III, Joseph J. (Department: 3723)
Abrading
Abrading process
Glass or stone abrading
C451S056000, C451S060000, C451S286000, C451S287000, C451S296000, C451S301000, C451S443000, C451S444000, C451S446000
Reexamination Certificate
active
06949011
ABSTRACT:
A method and apparatus for cleaning a web-based chemical-mechanical planarization (CMP) system. Specifically, a fluid spray bar is coupled to a frame assembly which may be mounted on a CMP system. The fluid spray bar will move along the frame assembly. As the fluid spray bar traverses the length of the frame assembly, a cleaning fluid is sprayed onto the web in order to clean the web between planarization cycles.
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Chopra Dinesh
Moore Scott E.
Fletcher Yoder
McDonald Shantese
Micro)n Technology, Inc.
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