Surface position detecting method and apparatus including detect

Details Surface position detecting method and apparatus including detect Surface position detecting method and apparatus including detect

1996-04-23

1997-02-11

Le, Que T.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

2505593, 356401, G01N 2186

Patent

active

056024002

ABSTRACT:
A registration method is usable with projection optical system for projecting first and second patterns of a first object simultaneously upon a second object having a surface step, for measuring at different locations the surface position of the second object with respect to the direction of an optical axis of the projection optical system prior to the pattern projection to bring the surface of the second object into coincidence with an image plane of the projection optical system on the basis of the measurement, wherein the first pattern has a smaller depth of focus than that of the second pattern. The method includes bringing the surface position of the second object, at the location whereat the first pattern is to be projected, into coincidence with the image plane of the projection optical system; and correcting any tilt of the surface of the second object with respect to the image plane of the projection optical system.

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patent: 5241188 (1993-08-01), Mizutani

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