Method, apparatus, and computer program of searching for...

Details Method, apparatus, and computer program of searching for... Method, apparatus, and computer program of searching for...

2005-04-26

2005-04-26

Hoff, Marc S. (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Electrical signal parameter measurement system

C324S520000

Reexamination Certificate

active

06885950

ABSTRACT:
A method of searching for clustering faults is employed for semiconductor device manufacturing, The method enters data on faults present in a search target, calculates a frequency distribution of the faults in unit cells divided from the search target, approximates the frequency distribution by overlaying at least two discrete distribution functions, and searches for clustering faults according to weights of the discrete distribution functions on the frequency distribution.

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Wan et al., “Possibilistic-diagnosis theory for fault-section estimation and state identification of unobserved protective relays using tabu-search method”, Nov. 1998, IEEE Proceedings, v145 Issue 6, pp. 722-730.*
Ikota, M. et al., “Discrimination of Clustered Defects on Wafers Using Statistical Methods”, Proc. 1997 Second Int. Workshop Statistical Metrology, pp. 52-55.
Ikota, M. et al., “Discrimination of Clustered Defects on Wafers Using Statistical Methods”, Proc. 1997 Second Int. Workshop Statistical Metrology, pp. 52-55.

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