Method and apparatus for bottleneck feed factor based...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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C700S095000, C700S099000

Reexamination Certificate

active

06868298

ABSTRACT:
A method and system for scheduling lots for semiconductor manufacturing. The method and system comprising: determining a goal weighing factor (502); calculating the bottleneck feed factor for each lot in a tool queue (514); calculating the critical ratio for said each lot in a tool queue (516); calculating the relative rank of each lot in a tool queue; displaying the relative rank of each lot in a tool queue, for each tool queue; and selecting the lots in each tool queue for tooling according to said relative rank.

REFERENCES:
patent: 5706200 (1998-01-01), Kumar et al.
patent: 5748478 (1998-05-01), Pan et al.
patent: 6243612 (2001-06-01), Rippenhagen et al.

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