Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal
Reexamination Certificate
2005-09-13
2005-09-13
Le, Dung A. (Department: 2818)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
C438S029000, C438S048000
Reexamination Certificate
active
06943048
ABSTRACT:
An optoelectronic material, device applications, and methods for manufacturing the optoelectronic material are provided to make it possible to obtain stable characteristics without deterioration of luminescence over time in the atmosphere. The optoelectronic material is composed of a porous silicon the surface of which is nitrided to form a silicon nitride layer thereon. This allows a stable electroluminescence to be obtained, without oxidation of the surface of the porous silicon.
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Arai Toshihiro
Kimoto Kazuhiko
Makino Toshiharu
Suzuki Nobuyasu
Yamada Yuka
Browdy and Neimark P.L.LC.
Le Dung A.
Matsushita Electric - Industrial Co., Ltd.
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