Mask and method of manufacturing the same,...

Details Mask and method of manufacturing the same,... Mask and method of manufacturing the same,...

2005-08-16

2005-08-16

Everhart, Caridad (Department: 2825)

Semiconductor device manufacturing: process

Bonding of plural semiconductor substrates

C438S456000, C257S618000, C257S706000

Reexamination Certificate

active

06930021

ABSTRACT:
A method of manufacturing a mask includes: attaching a second substrate having a plurality of penetrating holes to a first substrate having an opening. The second substrate is attached such that the penetrating holes are positioned within the opening. A groove is formed on a surface of the first substrate facing the second substrate. The groove is utilized to form a flow path between the first and second substrates.

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