Polishing apparatus

Details Polishing apparatus Polishing apparatus

2005-10-11

2005-10-11

Nguyen, Dung Van (Department: 3723)

Abrading

Abrading process

With tool treating or forming

C451S057000, C451S444000, C451S443000

Reexamination Certificate

active

06953390

ABSTRACT:
A polishing surface is conditioned by pressing a diamond dresser against the polishing surface to thinly shave a surface of the polishing surface. Foreign matter clogging concavities formed in the polishing surface is scraped by pressing a brush dresser against the polishing surface in a state such that a polishing liquid is not supplied to the polishing table. A liquid composed of a mixture of a liquid or inert gas with pure water or a chemical liquid is ejected onto the polishing surface to clean the polishing surface.

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patent: 2002-144227 (2002-05-01), None

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