Acceleration sensor and method of manufacture thereof

Details Acceleration sensor and method of manufacture thereof Acceleration sensor and method of manufacture thereof

2005-10-25

2005-10-25

Tsai, H. Jey (Department: 2812)

Active solid-state devices (e.g., transistors, solid-state diode

Housing or package

C257S704000, C257S710000, C438S051000, C438S106000

Reexamination Certificate

active

06958529

ABSTRACT:
An acceleration sensor which is inexpensive and accomplishes its small-size and light-weight structure, and a manufacturing method thereof. A sensor unit provided on a base is sealed by a cap joined to a frame portion of the base in an eutectic manner. The cap includes a cap main body made of a semiconductor material having a conductive property and a metal film provided on the circumferential edge of the cap main body. The frame portion includes a frame main body made of doped polysilicon, a diffusion preventive film selectively provided on the frame main body, and a joining layer. The joining layer has one area as a conductive portion made of a conductive material, and another area as a joining portion made of a semiconductor.

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