Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-09-06
2005-09-06
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C250S23700G
Reexamination Certificate
active
06940603
ABSTRACT:
A surface-emitting laser is disposed on a photodetector disposed in parallel with a scale, so that an optical pattern surface of the scale can be irradiated with a light beam having a desired shape. A major axis of the light beam emitted from the surface-emitting laser is vertical to the photodetector, and forms a beam spot on the optical pattern surface of the scale. A light emission portion of the light source is disposed in a 0-order diffracted light region from the scale and other than a region in which only a 0-order diffracted light and 1st-order diffracted light or a 0-order diffracted light and −1st-order diffracted light interfere. A light shield metal and/or a dummy light receiving portion are/is disposed to surround a light receiving portion outer periphery, and is disposed in a region between an inner periphery of the light receiving portion and the surface-emitting laser.
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Connolly Patrick J.
Olympus Corporation
Toatley , Jr. Gregory J.
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