Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2005-09-13
2005-09-13
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000
Reexamination Certificate
active
06943865
ABSTRACT:
A device manufacturing apparatus for use in manufacturing a device. The apparatus includes a main booth in which an exposure apparatus is installed, a transport booth in which a mechanism arranged to transfer an object to and/or from the exposure apparatus is installed, an air conditioning booth having a temperature adjusting device which supplies a temperature adjusting gas to the main booth and the transport booth to control temperature therein, a duct through which the temperature adjusting gas at least in the transport booth is recovered to the air conditioning booth, a first component arranged in a space that is outside the duct but inside the main booth to detect a state of a predetermined portion in the space, or to drive or to control the predetermined portion, and a second component arranged in the duct and electrically connected to the first component to receive an electrical signal that pertains to the state of the predetermined portion from the first component, or to supply an electrical signal generated to drive or to control the predetermined portion to the first component.
REFERENCES:
patent: 5134436 (1992-07-01), Fujioka
patent: 5231291 (1993-07-01), Amemiya et al.
patent: 5499076 (1996-03-01), Muraki
patent: 5871587 (1999-02-01), Hasegawa et al.
patent: 5907390 (1999-05-01), Sakamoto
patent: 6133982 (2000-10-01), Inoue et al.
patent: 6226073 (2001-05-01), Emoto
patent: 6320646 (2001-11-01), Mouri
patent: 6370793 (2002-04-01), Chae et al.
patent: 6445441 (2002-09-01), Mouri
patent: 6552773 (2003-04-01), Emoto
patent: 6580958 (2003-06-01), Takano
patent: 6616898 (2003-09-01), Hara et al.
patent: 6753942 (2004-06-01), Nagahashi
patent: 2002/0097205 (2002-07-01), Nakamura
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Nguyen Henry Hung
LandOfFree
Device manufacturing apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Device manufacturing apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device manufacturing apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3436326