Thermal processing system and thermal processing method

Details Thermal processing system and thermal processing method Thermal processing system and thermal processing method

2005-05-03

2005-05-03

Fuqua, Shawntina (Department: 3742)

Electric resistance heating devices

Heating devices

Radiant heater

C392S416000, C219S390000, C219S405000, C219S411000

Reexamination Certificate

active

06889004

ABSTRACT:
A thermal processing system for heating a to-be-processed object while rotating the to-be-processed object by a placement part, and for performing thermal processing on the to-be-processed object by supplying a predetermined gas into a processing chamber. An outer ring part provided outside the processing chamber and an inner ring part provided inside the processing chamber have pluralities of circumferentially arranged magnetic poles. The magnetic poles apply magnetic forces between the outer ring part and inner ring part so that the inner ring part will follow the rotation of the outer ring part. The number of magnetic poles of the outer ring part and inner ring part are selected to achieve an allowable angular error when between the outer ring part and inner ring part during rotation.

REFERENCES:
patent: 5376862 (1994-12-01), Stevens
patent: 5482602 (1996-01-01), Cooper et al.
patent: 5840125 (1998-11-01), Gibbons et al.
patent: 5902185 (1999-05-01), Kubiak et al.
patent: 5982986 (1999-11-01), Davenport

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