Laser oscillation apparatus, exposure apparatus,...

Details Laser oscillation apparatus, exposure apparatus,... Laser oscillation apparatus, exposure apparatus,...

2005-03-22

2005-03-22

Eckert, George (Department: 2815)

Coherent light generators

Particular beam control device

Optical output stabilization

C372S028000, C372S029020, C372S020000

Reexamination Certificate

active

06870865

ABSTRACT:
A laser oscillation apparatus includes a wavelength change unit for driving a wavelength selection element in a band-narrowing module and changing the oscillation wavelength of a laser beam to a target value, and an oscillation history memory for storing the oscillation state of the laser beam as an oscillation history. The wavelength change unit drives the wavelength selection element on the basis of the oscillation history and changes the oscillation wavelength of the laser beam to the target value.

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European Search Report dated Oct. 28, 2003, issued in corresponding European pat nt appln. No. 01 30 3730, forwarded in a Communication dated Nov. 6, 2003.

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