Substrate holding device, semiconductor manufacturing...

Details Substrate holding device, semiconductor manufacturing... Substrate holding device, semiconductor manufacturing...

2005-03-01

2005-03-01

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000

Reexamination Certificate

active

06862080

ABSTRACT:
A substrate holding device includes a base member capable of removably holding a plate having a contact member to come into contact with a substrate. The base member flatten-corrects the plate by suctioning the plate. The substrate holding device further includes a first attracting mechanism that attracts the substrate onto the plate in a status such that the plate is held on the base member, and a second attraction mechanism that attracts the plate onto the base member.

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