Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate
2005-04-26
2005-04-26
Mills, Gregory (Department: 1763)
Coating apparatus
Gas or vapor deposition
Multizone chamber
C118S720000, C118S726000, C118S730000, C204S298250
Reexamination Certificate
active
06884299
ABSTRACT:
A deposition apparatus for organic light emitting devices. The deposition apparatus includes a substrate conveying system and at least a chamber. In this case, the substrate conveying system is a circular turntable shape. The chambers are provided around the substrate conveying system in a specific order. While the substrate conveying system rotates in a circular direction, at least a substrate is transferred into the chambers for deposition. The substrate carrier, a shadow mask and a shadow mask alignment system, are positioned on the substrate carrier. After the deposition, at least a layer is deposited on each of the substrates, so as to manufacture at least an organic light-emitting device.
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Chang Yi
Lu Tien-Rong
Wang Jih-Yi
Wei Mao-Kuo
Birch & Stewart Kolasch & Birch, LLP
Mills Gregory
RiTdisplay Corporation
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