Thermosensitive flow rate detecting element and method for...

Details Thermosensitive flow rate detecting element and method for... Thermosensitive flow rate detecting element and method for...

2005-01-25

2005-01-25

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Volume or rate of flow

Thermal type

Reexamination Certificate

active

06845662

ABSTRACT:
A dummy pattern is constituted by frame-shaped first patterns formed on a flat substrate so as to surround a resistance heater and a fluid temperature resistance thermometer, and frame-shaped second patterns formed on inner perimeter sides of the first patterns, edge portions of first and second diaphragm portions being positioned between the first patterns and the second patterns.

REFERENCES:
patent: 6314807 (2001-11-01), Kawai et al.
patent: 6470742 (2002-10-01), Yamakawa et al.
patent: 6631638 (2003-10-01), James et al.
patent: 06-249693 (1994-09-01), None
patent: 09-043018 (1997-02-01), None

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