High frequency sputtering device

Details High frequency sputtering device High frequency sputtering device

2005-04-12

2005-04-12

Cantelmo, Gregg (Department: 1745)

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C204S298060

Reexamination Certificate

active

06878249

ABSTRACT:
The stray capacitance between the target and grounding member and the loss of high frequency electric current are reduced by arranging dielectric members and metal members with a particular configuration at the circumference of the cathode and target.

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