Method of making a thin-film magnetic head having a...

Details Method of making a thin-film magnetic head having a... Method of making a thin-film magnetic head having a...

2005-05-03

2005-05-03

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603120, C029S603150, C029S603160, C029S603180, C360S313000

Reexamination Certificate

active

06886239

ABSTRACT:
In the method of making a thin-film magnetic head in accordance with the present invention, an electron beam resist is irradiated with electron beams in a state where an electrically conductive member is in contact with a magnetoresistive film. Since the magnetoresistive film electrically connects individual forming positions to be formed with magnetoresistive devices, charges stored near the forming positions upon irradiation with the electron beams can be drawn to the outside by way of the electrically conductive member. As a consequence, the electron beams are less likely to lose their rectilinearity, whereby the writing precision for patterning the magnetoresistive film by electron beam lithography can be improved.

REFERENCES:
patent: 5095613 (1992-03-01), Hussinger et al.
patent: 5228184 (1993-07-01), Kishi
patent: 5734531 (1998-03-01), Nix et al.
patent: 5744284 (1998-04-01), Laub et al.
patent: 5850326 (1998-12-01), Takano et al.
patent: 5920444 (1999-07-01), Heeren et al.
patent: 6187513 (2001-02-01), Katakura
patent: A-2-276237 (1990-11-01), None
patent: A-2001-237217 (2001-08-01), None

Affiliated with

Also associated with

Rating

Method of making a thin-film magnetic head having a... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of making a thin-film magnetic head having a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making a thin-film magnetic head having a... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3425413