Double-ended tuning fork vibratory gyro-sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

Reexamination Certificate

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Reexamination Certificate

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06915694

ABSTRACT:
The object of the present invention is to provide an angular velocity sensor that uses Coriolis force with a flatly supported double tuning fork structure that uses an in-plane asymmetrical flexural secondary mode. A large support area is used to provide a high-precision angular velocity sensor with superior resistance to vibration and impact. A double tuning fork gyro-sensor is formed integrally from: two arms; a driver electrode formed on the arms; and a double tuning fork supporting the ends of the arms. Also included are: a detection module connected to the double tuning fork support section; a detection electrode formed on the detection module; and a support securing section for the detection module. When there is rotation, the Coriolis force acting on the arms is transferred to the detection module by way of the double tuning fork support section so that an in-plane asymmetrical flexural secondary vibration takes place.

REFERENCES:
patent: 5767405 (1998-06-01), Bernstein et al.
patent: 6227048 (2001-05-01), Kikuchi et al.
patent: 6481283 (2002-11-01), Cardarelli
patent: 04-029012 (1992-01-01), None
patent: 11-281372 (1999-10-01), None
patent: 2001-050751 (2001-02-01), None
patent: 2004-101392 (2004-04-01), None
“FEM Simulation of Quarts Crystal Double-Ended Tuning Fork Resonator for its Application to Vibratory Gyro-Sensor” by Kenji Sato; Atsushi Ono and Yoshio Tomikawa at The 23rd Symposium on Ulrasonic Electronics, Nov. 7-9, 2002 in Kanazawa, Japan, pp. 325-326.
Patent Abstracts of Japan for JP11-281372 published on Oct. 15, 1999.
“Experimental Investigation of Flatly Supported Vibratory Gyro-Sensor Using Quartz Crystal Trident-Type Tuning Fork Resonator” by Shiratori et al., Transducers '99, No. 3P2.26, pp. 82-85 at The 10th International Conference on Solid-State Sensors and Actuators, Jun. 7-10, 1999 in Kanazawa, Japan.
Patent Abstracts of Japan for 2004-101392 published on Apr. 2, 2004.
Patent Abstracts of Japan for 04-029012 published on Jan. 31, 1992.
Patent Abstracts of Japan for 2001-050751 published on Feb. 23, 2001.

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