Semiconductor device test method and semiconductor device...

Details Semiconductor device test method and semiconductor device... Semiconductor device test method and semiconductor device...

2005-07-05

2005-07-05

Nguyen, Vinh P. (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S765010

Reexamination Certificate

active

06914444

ABSTRACT:
A defective position of a sample to be tested is detected by irradiating the test sample and another test sample with electron beam while scanning the test samples, storing values of current generated in the test samples correspondingly to electron beam irradiation positions as current waveforms and comparing the current waveforms.

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“An In-Line Contact and Via Hole Inspection Method Using Electron Beam Compensation Current”, Yamada et al., IEEE 1999, available from http://www.fabsol.com/us/images/library/21.pdf.

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