PIPE STRUCTURE, ALIGNMENT APPARATUS, ELECTRON BEAM...

Details PIPE STRUCTURE, ALIGNMENT APPARATUS, ELECTRON BEAM... PIPE STRUCTURE, ALIGNMENT APPARATUS, ELECTRON BEAM...

2005-07-05

2005-07-05

Rodriguez, Paul (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C138S114000

Reexamination Certificate

active

06915179

ABSTRACT:
A pipe structure includes a double pipe having a resin inner pipe and a resin outer pipe covering an outside of the inner pipe, and a discharge mechanism for discharging fluid in a space between the inner pipe and the outer pipe. The double pipe is used in a vacuum chamber having a vacuum atmosphere.

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