Thin film capacitor and method of manufacturing the same

Details Thin film capacitor and method of manufacturing the same Thin film capacitor and method of manufacturing the same

2005-04-19

2005-04-19

Reichard, Dean A. (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C361S321400, C361S306300, C361S311000, C361S313000, C361S301400, C438S104000, C438S393000, C438S396000

Reexamination Certificate

active

06882516

ABSTRACT:
The present invention comprises the steps of (a) forming a first electrode on a substrate via an adhesion enhancing layer, (b) forming a capacitor insulating film containing a laminated film, in which an amorphous dielectric film and a polycrystalline dielectric film are laminated via a wave-like interface, by forming sequentially and successively the amorphous dielectric film and the polycrystalline dielectric film made of same material on the first electrode, (c) forming a second electrode on the capacitor insulating film, and (d) a step of annealing the capacitor insulating film in an oxygen atmosphere.

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