Piezoelectric actuator, liquid jetting head and liquid...

Details Piezoelectric actuator, liquid jetting head and liquid... Piezoelectric actuator, liquid jetting head and liquid...

2005-09-13

2005-09-13

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S363000, C310S358000

Reexamination Certificate

active

06943485

ABSTRACT:
It is an object of the present invention to provide a piezoelectric actuator which uses strontium ruthenate as the material of the bottom electrode, and which uses PMN-PT as the material of the piezoelectric layer. This piezoelectric actuator comprises a base layer (31, 20) of SiO2or Si ((100) orientation or (110) orientation), a buffer layer (41) constituted by strontium ruthenate (SRO), and a piezoelectric layer (44) constituted by a relaxor dielectric (PMN-PT) with a rhombohedral or quasi-cubic crystal structure oriented in the (001) direction at room temperature.

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