Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-03-29
2005-03-29
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000, C355S071000
Reexamination Certificate
active
06873400
ABSTRACT:
It is an object of the present invention to smoothly join divided patterns adjacent to each other in a synchronous moving direction when a mask and a substrate are moved in synchronization, and the divided patterns are joined and picture-synthesized on the substrate. According to the invention, when the mask and the substrate are moved in synchronization with respect to irradiation with an exposing light, the divided patterns of the mask are projected on the substrate, and a plurality of divided patterns adjacent on the substrate are joined and exposed, the divided patterns adjacent to each other in the synchronous moving direction partially overlap each other.
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Kato Masaki
Machino Katsuya
Murakami Masaichi
Toguchi Manabu
Mathews Alan
Nikon Corporation
Oliff & Berridg,e PLC
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