Semiconductor laser diode chip and its positioning and...

Coherent light generators – Particular active media – Semiconductor

Reexamination Certificate

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C372S036000

Reexamination Certificate

active

06882668

ABSTRACT:
Positioning marks15, 16are formed at predetermined positions with respect to an active layer11buried in an LD chip body10.In an Au metallized layer12for solder joining on the active layer11,marks17, 18for measurement are precisely formed by the same mask with which the positioning marks15, 16are formed. The marks17, 18for measurement are arranged closer to the active layer11in comparison with the positioning marks15, 16.Therefore, the distances between the active layer11and the marks17, 18for measurement can be respectively measured with high accuracy. In mounting of the LD chip to a substrate in a passive alignment technique, relative positions of the active layer and the positioning marks are measured in advance with high accuracy and the LD chip can be mounted to the substrate by correcting both the relative positions. Thus, the LD chip is positioned with high accuracy to be mounted to the substrate. The LD chip and an optical waveguide, or an optical fiber arranged in the substrate, can be coupled to each other with high coupling efficiency.

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Tanaka et al., “High Optical Coupling Scheme in LD Modules with Silicon Platform Technology”, IEICE Trans. Electron, vol. E80-C, No. 1, Jan. 1997, p. 107-111.

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