Stage-actuators that do not generate fluctuating magnetic...

Details Stage-actuators that do not generate fluctuating magnetic... Stage-actuators that do not generate fluctuating magnetic...

2005-01-04

2005-01-04

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

Reexamination Certificate

active

06838808

ABSTRACT:
Stage devices are disclosed having especial utility in certain types of microlithography systems. The stage devices impart controlled motion to a stage or platform without generating fluctuating electromagnetic fields. The stage devices include stage-actuators that do not rely on electromagnetics for operation. Multiple stage-actuators achieve motion of a slider relative to a guide bar. Each stage-actuator includes at least two actuator-portions that collectively provide an “inchworm” walking manner of motion of the slider relative to the guide bar. Each actuator-portion includes a respective pressure-application member. The pressure-application members are selectively actuated so as to engage a respective guide bar in a coordinated manner that serves to “push” the slider along the guide bar. Each actuator-portion includes a respective first piezoelectric element that urges the respective pressure-application member against the guide bar and retracts the pressure-application member from the guide bar, and a respective second piezoelectric element that moves the respective pressure-application member in the longitudinal direction of the guide bar.

REFERENCES:
patent: 4525852 (1985-07-01), Rosenberg
patent: 5332942 (1994-07-01), Rennex
patent: 6337532 (2002-01-01), Johansson et al.
patent: 6437485 (2002-08-01), Johansson
patent: 6583597 (2003-06-01), Tanaka et al.
patent: 6674085 (2004-01-01), Miura et al.
patent: 20020180312 (2002-12-01), Tanaka
patent: 2003318081 (2003-07-01), None

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