Vertical cavity surface emitting laser and method for...

Details Vertical cavity surface emitting laser and method for... Vertical cavity surface emitting laser and method for...

2005-07-12

2005-07-12

Harvey, Minsun Oh (Department: 2828)

Coherent light generators

Particular resonant cavity

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Reexamination Certificate

active

06917640

ABSTRACT:
A vertical cavity surface emitting laser (VCSEL) is provided with an aperture for guiding a flow of electric currents. The aperture is defined by an oxide so that the aperture is formed to be substantially circular in shape. A method for fabricating the laser is also disclosed. The structure of the (VCSEL) makes it possible to control the oxidation rates of an oxidable layer in which an aperture is formed for guiding the flow of electric currents of a VCSEL, by forming a mesa trench of the VCSEL in a segmented structure which has a predetermined number of segments. Accordingly, it is possible to form an aperture approximately in a circular shape, so that the light emitting angle and shape of the VCSEL are easily controlled.

REFERENCES:
patent: 5729566 (1998-03-01), Jewell
patent: 6658040 (2003-12-01), Hu et al.
patent: 2004/0081215 (2004-04-01), Johnson et al.
patent: 2004/0101009 (2004-05-01), Johnson et al.

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