Valves and valve actuation – With means to increase head and seat contact pressure – With positive reduction
Reexamination Certificate
2005-07-12
2005-07-12
Look, Edward K. (Department: 3751)
Valves and valve actuation
With means to increase head and seat contact pressure
With positive reduction
C251S187000, C414S221000
Reexamination Certificate
active
06916009
ABSTRACT:
A load-lock device for introducing substrates into a vacuum chamber comprises a load-lock chamber with at least one opening on the input side for introducing the substrates from an atmosphere area located in front of the input-side opening into an interior space located inside the load-lock chamber, and at least one opening on the output side for connecting the interior space of the load-lock chamber to the interior space of a vacuum chamber with the intermediary of a valve; at least one vacuum door which is associated with a respective opening on the input side and which comprises a closure-element which communicates with a drive device via at least one carrier rod and is adjustable by the drive device between a position in which the input-side opening is open and a position in which the input-side opening is closed and in which the closure element contacts a contact surface of the load-lock chamber, wherein, considered from the atmosphere area located in front of the input-side opening, the drive device is arranged behind a plane which extends through the contact surface of the load-lock chamber and lies vertical to the axis of the input-side opening.
REFERENCES:
patent: 5914493 (1999-06-01), Morita et al.
patent: 6056266 (2000-05-01), Blecha
patent: 6427973 (2002-08-01), Wagner
patent: 6488262 (2002-12-01), Oka
patent: 196 33 798 (1998-02-01), None
Fristoe Jr. John K.
Look Edward K.
Reed Smith LLP
VAT Holding AG
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