Stage apparatus and method of driving the same

Details Stage apparatus and method of driving the same Stage apparatus and method of driving the same

2005-03-29

2005-03-29

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000, C355S075000, C310S012060

Reexamination Certificate

active

06873404

ABSTRACT:
A stage apparatus includes a first stage, having a first linear motor portion with an iron core, for moving a first table, to move the first table with respect to a base table by driving the first linear motor portion, a second stage having a second linear motor portion connected to the first table and a second table, to move the second table, and an electromagnetic coupling provided between the first and second tables to apply an accelerating force to the second table in accordance with acceleration or deceleration of the first linear motor.

REFERENCES:
patent: 5467720 (1995-11-01), Korenaga et al.
patent: 5684856 (1997-11-01), Itoh et al.
patent: 5841250 (1998-11-01), Korenage et al.
patent: 6002465 (1999-12-01), Korenaga
patent: 6037680 (2000-03-01), Korenaga et al.
patent: 6107703 (2000-08-01), Korenaga
patent: 6128069 (2000-10-01), Korenaga
patent: 6144719 (2000-11-01), Hasegawa et al.
patent: 6157159 (2000-12-01), Korenaga et al.
patent: 6172738 (2001-01-01), Korenaga et al.
patent: 6177978 (2001-01-01), Korenaga
patent: 6281655 (2001-08-01), Poon et al.
patent: 6322060 (2001-11-01), Mayama et al.
patent: 6359677 (2002-03-01), Itoh et al.
patent: 6414742 (2002-07-01), Korenaga et al.
patent: 6570645 (2003-05-01), Korenaga et al.
patent: 20030034695 (2003-02-01), Binnard et al.
patent: 2000-106344 (2000-04-01), None

Affiliated with

Also associated with

Rating

Stage apparatus and method of driving the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Stage apparatus and method of driving the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stage apparatus and method of driving the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3411845