Humidity sensor

Details Humidity sensor Humidity sensor

2005-04-26

2005-04-26

Williams, Hezron (Department: 2856)

Measuring and testing

Gas analysis

Moisture content or vapor pressure

C073S335050, C073S335020, C073S335030, C073S029010, C073S029050, C073S031050, C073S023310

Reexamination Certificate

active

06883371

ABSTRACT:
A humidity sensor including an insulating substrate, and a lower electrode formed from a noble metal, a moisture sensitive layer formed of a porous body predominantly containing alumina and containing predetermined amounts of TiO2and SnO2and an upper electrode formed of a noble metal porous body successively formed on the insulating substrate. The upper electrode is connected to the moisture sensitive layer and a portion of the insulating substrate. Preferably, the lower electrode is formed of a porous body. More preferably, the lower and upper electrodes are formed from Pt. Furthermore, preferably, a heater and a temperature measurement resistor are provided in the insulating substrate and are located directly below the moisture sensitive layer.

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European Search Report for EP 01 30 0624 dated Feb. 4, 2002.

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