Abrading – Tool support for flexible-member tool – Including threaded means to retain tool holder
Reexamination Certificate
2005-03-29
2005-03-29
Nguyen, George (Department: 3723)
Abrading
Tool support for flexible-member tool
Including threaded means to retain tool holder
C451S006000, C451S008000, C451S009000, C451S010000, C451S056000, C451S041000, C451S289000
Reexamination Certificate
active
06872132
ABSTRACT:
Systems and methods for monitoring characteristics of a polishing pad used in polishing a micro-device workpiece are disclosed herein. In one embodiment, a method for monitoring a characteristic of a polishing pad includes applying ultrasonic energy to the polishing pad and determining a status of the characteristic based on a measurement of the ultrasonic energy applied to the polishing pad. In one aspect of this embodiment, applying ultrasonic energy includes applying ultrasonic energy from a transducer. The transducer can be carried by a conditioner, a fluid arm, a micro-device workpiece carrier, or a table. In another aspect of this embodiment, determining the status of the characteristic includes determining a thickness, density, surface contour, roughness, or texture of the polishing pad.
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Chandrasekaran Nagasubramaniyan
Elledge Jason B.
Micro)n Technology, Inc.
Nguyen George
Perkins Coie LLP
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