Supporting structure for a ceramic susceptor

Details Supporting structure for a ceramic susceptor Supporting structure for a ceramic susceptor

2005-04-12

2005-04-12

Mills, Gregory (Department: 1763)

Coating apparatus

Gas or vapor deposition

Work support

C118S725000, C118S500000, C156S345510, C156S345520, C361S234000, C219S444100, C219S544000, C392S416000, C392S418000

Reexamination Certificate

active

06878211

ABSTRACT:
A supporting structure for attaching a ceramic susceptor into a processing chamber is provided. The ceramic susceptor is used for placing and heating an article to be processed. The supporting structure has one or more supporting projections integrally provided on a back face of the ceramic susceptor and one or more supporting members mounted to the processing chamber and separated from the supporting projections. At least a part of the supporting member is made from a heat-insulating material and the supporting projection is attached to the supporting member by mechanical means.

REFERENCES:
patent: 5484486 (1996-01-01), Blackburn et al.
patent: 5522937 (1996-06-01), Chew et al.
patent: 6035101 (2000-03-01), Sajoto et al.
patent: 6066836 (2000-05-01), Chen et al.
patent: 6213478 (2001-04-01), Nishikawa
patent: 6589352 (2003-07-01), Yudovsky et al.
patent: 59232994 (1984-12-01), None
patent: 2001-0062301 (2001-07-01), None

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