Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate
2005-04-05
2005-04-05
Eley, Timothy V. (Department: 3724)
Abrading
Abrading process
Glass or stone abrading
C451S059000, C451S063000, C451S173000, C451S307000
Reexamination Certificate
active
06875085
ABSTRACT:
A polishing system such as a chemical mechanical belt polisher includes a hydrostatic fluid bearing that supports polishing pads and incorporates one or more of the following novel aspects. One aspect uses compliant surfaces surrounding fluid inlets in an array of inlets to extend areas of elevated support pressure around the inlets. Another aspect modulates or reverses fluid flow in the bearing to reduce deviations in the time averaged support pressure and to induce vibrations in the polishing pads to improve polishing performance. Another aspect provides a hydrostatic bearing with a cavity having a lateral extent greater than that of an object being polished. The depth and bottom contour of cavity can be adjusted to provide nearly uniform support pressure across an area that is surrounded by a retaining ring support. Changing fluid pressure to the retaining ring support adjusts the fluid film thickness of the bearing. Yet another aspect of the invention provides a hydrostatic bearing with spiral or partial cardiod drain grooves. This bearing has a non-uniform support pressure profile but provides a uniform average pressure to a wafer that is rotated relative to the center of the bearing. Another aspect of the invention provides a hydrostatic bearing with constant fluid pressure at inlets but a support pressure profile that is adjustable by changing the relative heights of fluid inlets to alter local fluid film thicknesses in the hydrostatic bearing.
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Huynh Tim H.
Kao Shu-Hsin
Weldon David E.
Chen Tom
Eley Timothy V.
MacPherson Kwok & Chen & Heid LLP
Mosel Vitelic Inc.
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