Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2005-07-19
2005-07-19
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000
Reexamination Certificate
active
06919951
ABSTRACT:
Disclosed is an illumination system for illuminating an illumination region with uniform illuminance, wherein the light intensity gravity center of light impinging on the illumination region is registered with the center of light rays. The illumination system includes a first reflection type integrator, a first condensing mirror system for superposing light beams from the first reflection type integrator one upon another on the surface to be illuminated, a second reflection type integrator disposed between the light source and said first reflection type integrator, and a second condensing mirror system for superposing light beams from the second reflection type integrator one upon another on the first reflection type integrator. Also disclosed is an exposure apparatus having such illumination system, and a device manufacturing method using the same.
REFERENCES:
patent: 4918583 (1990-04-01), Kudo et al.
patent: 5669708 (1997-09-01), Mashima et al.
patent: 5677939 (1997-10-01), Oshino
patent: 5891806 (1999-04-01), Shibuya et al.
patent: 5995582 (1999-11-01), Terashima et al.
patent: 6045976 (2000-04-01), Haruki et al.
patent: 6078641 (2000-06-01), Mitsui et al.
patent: 6266389 (2001-07-01), Murayama et al.
patent: 6452661 (2002-09-01), Komatsuda
patent: 6504896 (2003-01-01), Miyake et al.
patent: 6526118 (2003-02-01), Komatsuda et al.
patent: 6594334 (2003-07-01), Ota
patent: 2002/0136351 (2002-09-01), Singer
patent: 0 416 811 (1991-03-01), None
patent: 0 435 644 (1991-07-01), None
patent: 0 939 341 (1999-09-01), None
patent: 1 202 101 (2000-05-01), None
patent: 1 026 547 (2000-08-01), None
patent: 1 028 456 (2000-08-01), None
patent: 7-235472 (1995-09-01), None
patent: 11-312638 (1999-11-01), None
patent: 1 028 456 (2000-08-01), None
patent: 01/09681 (2001-02-01), None
patent: WO 01/09681 (2001-02-01), None
Official Search Report from European Patent Office issued in foreign counterpart application No. EP 02 25 5194.
Partial European Search Report, Dated Nov. 18, 2003.
Canon Kabushiki Kaisha
Morgan & Finnegan , LLP
Nguyen Henry Hung
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