Method and apparatus for providing and integrating a general...

Details Method and apparatus for providing and integrating a general... Method and apparatus for providing and integrating a general...

2005-03-08

2005-03-08

Hassanzadeh, Parviz (Department: 1763)

Coating apparatus

Gas or vapor deposition

With treating means

C118S7230IR, C118S7230ER, C156S345350, C156S345360

Reexamination Certificate

active

06863021

ABSTRACT:
A General Metal Delivery Source (GMDS) for delivery of volatile metal compounds in gaseous form to processing apparatus has a reaction chamber holding a solid metal source material and connecting to the processing apparatus, and having an outlet for provision of the volatile metal compounds, a source heater coupled to the reaction chamber for heating said solid metal source material, a gas source for providing a reactive gas, a gas delivery conduit from the gas source to the reaction chamber for delivering gas species to the reaction chamber; and a plasma generation apparatus coupled to the gas delivery conduit. The plasma generation apparatus dissociates reactive gas molecules providing monatomic reactive species to the reaction chamber, and the monatomic reactive species combine with metal from the heated solid metal source material forming the volatile metal compounds.

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Hassanzadeh et al, “Infrared Spectra of GeS, SGeS, SGeO, and OGeO in Solid Argon” J. Phys. Chem. 1992, vol. 96, pp. 6181-6185.

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