Exposure apparatus, control method for the same, and device...

Details Exposure apparatus, control method for the same, and device... Exposure apparatus, control method for the same, and device...

2005-04-12

2005-04-12

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S053000, C355S052000, C355S077000

Reexamination Certificate

active

06879381

ABSTRACT:
An exposure apparatus has a projection optical system for projecting a pattern onto a substrate. The projection optical system includes a correction lens for correcting optical characteristics thereof. The apparatus includes a driving unit which drives the correction lens to a target position, a monitor unit which monitors a positional displacement of the correction lens from the target position during exposure of the substrate, and a control unit which controls a process during or after the exposure on the basis of a monitoring result obtained by the monitor unit.

REFERENCES:
patent: 6078380 (2000-06-01), Taniguchi et al.
patent: 6281966 (2001-08-01), Kenmoku
patent: 6556364 (2003-04-01), Meehan et al.
patent: 20020080338 (2002-06-01), Taniguchi
patent: 2897345 (1999-03-01), None

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