Method of separating a template from a substrate during...

Details Method of separating a template from a substrate during... Method of separating a template from a substrate during...

2005-03-22

2005-03-22

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C101S463100, C430S320000

Reexamination Certificate

active

06870301

ABSTRACT:
Processes and associated devices for high precision positioning of a template an substrate during imprint lithography includes a calibration system with a course calibration stage and a fine orientation stage capable of maintaining a uniform gap between the template and substrate. The fine orientation stage includes a pair of flexure members having flexure joints for motion about a pivot point intersected by first and second orientation axes. Actuators lengthen or shorten to expand or contract the flexure members. Separation of the template is achieved using a peel-and-pull method that avoids destruction of imprinted features from the substrate.

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Feldman et al., “Wafer Chuck for Magnification correction in X-ray Lithography,” Journal of Vacuum Science and Technology, Nov./Dec. 1998, pp. 3476-3479, vol. B 16(6).

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