Formation of a bridge in a micro-device

Details Formation of a bridge in a micro-device Formation of a bridge in a micro-device

2005-01-25

2005-01-25

Hassanzadeh, Parviz (Department: 1763)

Etching a substrate: processes

Forming groove or hole in a substrate which is subsequently...

C216S041000, C216S083000

Reexamination Certificate

active

06846426

ABSTRACT:
A method of micro-machining comprising providing a primary region of at least a first material which contacts a second material at at least one end portion thereof, the method comprising providing an infill material on to the second material, patterning and etching said infill material to form a hole through the infill material to the second material, depositing the first material on to said infill material so that the at least one portion of the first material contacts the second material through the hole. The method can be used to provide a track bridging suspended portions of micro-machined structures. Also a method of narrowing and sealing top portions of channels cut into a wafer is disclosed.

REFERENCES:
patent: 3560893 (1971-02-01), Wen
patent: 4289846 (1981-09-01), Parks et al.
patent: 4851080 (1989-07-01), Howe et al.
patent: 4945069 (1990-07-01), Carter
patent: 4997521 (1991-03-01), Howe et al.
patent: 5275973 (1994-01-01), Gelatos
patent: 5324553 (1994-06-01), Ovshinsky et al.
patent: 5324683 (1994-06-01), Fitch et al.
patent: 5345824 (1994-09-01), Sherman et al.
patent: 5364497 (1994-11-01), Chau et al.
patent: 5427975 (1995-06-01), Sparks et al.
patent: 5620933 (1997-04-01), James et al.
patent: 5635739 (1997-06-01), Grieff et al.
patent: 5656123 (1997-08-01), Salimian et al.
patent: 5665632 (1997-09-01), Lur et al.
patent: 5686743 (1997-11-01), Lammert
patent: 5725729 (1998-03-01), Greiff
patent: 5738757 (1998-04-01), Burns et al.
patent: 5747353 (1998-05-01), Bashir et al.
patent: 5798283 (1998-08-01), Montague et al.
patent: 5817446 (1998-10-01), Lammert
patent: 5871655 (1999-02-01), Lee et al.
patent: 5885124 (1999-03-01), Hattori
patent: 0 451 992 (1991-10-01), None
patent: 0 582 797 (1994-02-01), None
European Search Report dated Jul. 21, 2004.

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