Systems and methods for high-accuracy displacement...

Details Systems and methods for high-accuracy displacement... Systems and methods for high-accuracy displacement...

2005-03-29

2005-03-29

Bruce, David V. (Department: 2882)

Optics: measuring and testing

Position or displacement

C382S278000, C382S295000

Reexamination Certificate

active

06873422

ABSTRACT:
An image comparison method and an interpolation method to determine the image offset corresponding to the extreme value of the comparison contributes to systematic errors in estimating the displacement of the surface from the images. The systematic errors are rejected by correlation-based comparison systems and methods which reduce the curvature of the correlation function for offsets that bound the extreme value, and by interpolation systems and methods that are relatively insensitive to the asymmetry of the correlation function value points selected as the basis for the interpolation. These systems and methods allow fast, highly accurate, displacement determinations using relatively simplified calculations and relatively few correlation function value points.

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