Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-07-05
2005-07-05
Epps, Georgia (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S290000, C359S224200, C359S298000, C073S504120
Reexamination Certificate
active
06914710
ABSTRACT:
A Micro-Electro-Mechanical Systems (MEMS) actuator employs electrostatic comb electrodes to position optical elements along multiple axes. In one embodiment, an actuator assembly includes an actuator support, typically a silicon wafer, supporting a fixed comb with a plurality of teeth. A frame flexibly connected to the actuator support includes a complementary set of movable comb electrodes, the teeth of which are arranged interdigitally with the teeth of the fixed combs. The frame can be tilted with respect to the actuator support along a first fulcrum axis by applying a potential difference between the fixed and movable combs. Each actuator assembly also includes an actuated member, a mirror mount in one embodiment, flexibly connected to the frame. The actuated member and the frame include electrical isolated, interdigitated, combs. The actuated member can be moved relative to the frame along a second fulcrum axis by applying a potential between these interdigitated combs. A bonding process for fabrication of an array of actuators is described.
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Fu Yee-Chung
Novotny Vlad J.
Active Optical Networks, Inc.
Behiel Arthur J.
Choi William
Epps Georgia
Silicon Edge Law Group LLP
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